Primus (Transformers) is the creator-god of all Cybertronian life.
Unicron (Transformers) is considered to be the Cybertronian god of destruction whereas his brother, Primus, represents creation.
The Consortium (Generator Rex) in their new forms after being infused with the power of the Meta-Nanites.
After being infused with the power of the Mantra Reactor, Asura (Asura's Wrath) gained the power of Pride, Lust, Greed, Sloth, Vanity, Violence, Melancholy, and Wrath, allowing him transform into Asura The Destructor.
After exposure to the Celestial Ship, Apocalypse's (Marvel Comics) body became altered with mechanical modifications making him into an all powerful cyborg mutant.
After traveling the universe, AMAZO (DC Comics/JLU) transcended his own nanotechnology, becoming a nigh-omnipotent machine capable of overwhelming the Justice League.
Brainiac (DC Comics) is a highly intelligent being capable of transferring his consciousness into powerful robotic/cyborg bodies that are able to do great damage to Superman.
In the Batman Beyond timeline, Brainiac (DC Comics) was able to assimilate the entire Earth.
When Lex luthor fused with Brainiac (DC Comics/JLU) along with the Dark Heart, they were able to become single ultimate being with enough power to destroy the entire universe and rebuild it.
The Anti-Monitor (DC Comics) is one of the most formidable and powerful beings in the known universe.
After fusing with Model W, Master Albert (Mega Man ZX Advent) became the "Ultimate Mega Man".
Omega (Mega Man Zero 3) also known "the Devil Reploid" and "the Ultimate Reploid" is an incredibly dangerous and powerful Reploid created by Dr. Weil.
The General (Eon Kid) is a robot that possesses nearly unlimited powers that allow him to do virtually anything, even prevent all cosmic radiation entering the planets atmosphere.
The Devil Gundam/Dark Gundam (Mobile Fighter G Gundam) is a viciously powerful Gundam originally built to aid mankind, it malfunctioned and became a twisted menace using its abilities of self recovery, self replication, and self evolution to become a nearly unstoppable force with the power to devour an entire planet.
Matrix (Valkyrie Crusade) is the transcendent mother of all machines.
Ragnarok (Valkyrie Crusade) is a transcendent WMD machine able to defy and kill deities.
Tengen Toppa Gurren Lagann (Gurren Lagann) is the most powerful mecha in the universe, spanning 10 million light years across with the power to rip holes in dimensions.
Cyber-Akuma (Marvel Super Heroes vs Street Fighter) is a godlike techno-organic being thanks to a combination between Celestial technology provided by Apocalypse and the power of the Satsui no Hadou.
With the power of the Infinity Stones, Ultron and Sigma merged into Ultron Sigma (Marvel vs. Capcom: Infinite); along with the abilities of the two fused entities, Ultron Sigma possesses the Infinity Stones of Space and Reality, granting him nigh-omnipotent power.
After being overclocked by Cubert Farnsworth, Bender (Futurama) gradually evolved into a godlike robot.
After acquiring the Supra-Force Metal, Colonel Redips (Mega Man X: Command Mission) evolved into a godlike form, becoming Great Redips.
MEKHANE (SCP Foundation), also known as the Broken God, is the God of Machines and the supreme giver of order in the multiverse.